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Electrical Atomic Force Microscopy for Nanoelectronics

  • Umberto Celano
Book

Part of the NanoScience and Technology book series (NANO)

Table of contents

  1. Front Matter
    Pages i-xx
  2. Christian Rodenbücher, Marcin Wojtyniak, Kristof Szot
    Pages 29-70
  3. Andreas Schulze, Pierre Eyben, Jay Mody, Kristof Paredis, Lennaert Wouters, Umberto Celano et al.
    Pages 71-106
  4. Simon Martin, Brice Gautier, Nicolas Baboux, Alexei Gruverman, Adrian Carretero-Genevrier, Martí Gich et al.
    Pages 173-203
  5. Stefano Brivio, Jacopo Frascaroli, Min Hwan Lee
    Pages 205-229
  6. Atsufumi Hirohata, Marjan Samiepour, Marco Corbetta
    Pages 231-265
  7. Christina Villeneuve-Faure, Kremena Makasheva, Laurent Boudou, Gilbert Teyssedre
    Pages 267-301
  8. Filippo Giannazzo, Giuseppe Greco, Fabrizio Roccaforte, Chandreswar Mahata, Mario Lanza
    Pages 303-350
  9. Thomas Hantschel, Thierry Conard, Jason Kilpatrick, Graham Cross
    Pages 351-384
  10. Kurt A. Rubin, Yongliang Yang, Oskar Amster, David A. Scrymgeour, Shashank Misra
    Pages 385-408

About this book

Introduction

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.


Keywords

Atomic Force Microscope Nanoscale materials analysis VLSI metrology Nanoelectronic materials Nanoelectronic devices Ferroelectrics for logic and memory High-k dielectric materials Diamond tip for AFM Scanning capacitance microscopy

Editors and affiliations

  • Umberto Celano
    • 1
  1. 1.IMECLeuvenBelgium

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-030-15612-1
  • Copyright Information Springer Nature Switzerland AG 2019
  • Publisher Name Springer, Cham
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-030-15611-4
  • Online ISBN 978-3-030-15612-1
  • Series Print ISSN 1434-4904
  • Series Online ISSN 2197-7127
  • Buy this book on publisher's site