Diffractive Optics and Optical Microsystems

  • S. Martellucci
  • A. N. Chester

Table of contents

  1. Front Matter
    Pages i-ix
  2. Theory and Design

    1. Front Matter
      Pages 1-1
    2. C. Gómez-Reino, C. Bao, M. V. Pérez
      Pages 35-45
    3. R. Orta, S. Bastonero, R. Tascone
      Pages 47-56
    4. R. Borghi, M. Santarsiero, F. Frezza, G. Schettini
      Pages 75-82
    5. L. A. Kotomtseva, G. P. Lednyeva
      Pages 83-89
    6. L. A. Kotomtseva, G. P. Lednyeva
      Pages 91-99
  3. Materials and Processes

    1. Front Matter
      Pages 101-101
    2. G. C Righini, M. A. Forastiere
      Pages 103-118
    3. E. Di Fabrizio, L. Grella, M. Baciocchi, M. Gentili
      Pages 149-160
    4. S. Martellucci, M. Richetta, A. Tebano, A. Spena
      Pages 161-167
    5. R. Grunwald, S. Woggon, R. Ehlert
      Pages 169-177
    6. G. Baldacchini, E. De Nicola, R. M. Montereali, M. Cremona, M. Passacantando, F. Somma
      Pages 179-185

About this book

Keywords

LIGA Sensor electromagnetic wave microelectromechanical system (MEMS) micromechanics microsystems optics

Editors and affiliations

  • S. Martellucci
    • 1
  • A. N. Chester
    • 2
  1. 1.The University of Rome “Tor Vergata”RomeItaly
  2. 2.Hughes Research Laboratories, Inc.MalibuUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4899-1474-3
  • Copyright Information Springer-Verlag US 1997
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4899-1476-7
  • Online ISBN 978-1-4899-1474-3
  • About this book