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Theory and Application of Laser Chemical Vapor Deposition

  • Jyoti Mazumder
  • Aravinda Kar

Part of the Lasers, Photonics, and Electro-Optics book series (LPEO)

Table of contents

  1. Front Matter
    Pages i-xii
  2. Jyoti Mazumder, Aravinda Kar
    Pages 1-56
  3. Jyoti Mazumder, Aravinda Kar
    Pages 57-122
  4. Jyoti Mazumder, Aravinda Kar
    Pages 123-214
  5. Jyoti Mazumder, Aravinda Kar
    Pages 215-293
  6. Jyoti Mazumder, Aravinda Kar
    Pages 295-383
  7. Back Matter
    Pages 385-395

About this book

Introduction

In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.

Keywords

Absorption design energy laser modeling

Authors and affiliations

  • Jyoti Mazumder
    • 1
  • Aravinda Kar
    • 2
  1. 1.University of Illinois at Urbana-ChampaignUrbanaUSA
  2. 2.University of Central FloridaOrlandoUSA

Bibliographic information