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Chemical Vapor Deposition Polymerization

The Growth and Properties of Parylene Thin Films

  • Jeffrey B. Fortin
  • Toh-Ming Lu

Table of contents

  1. Front Matter
    Pages i-xvii
  2. Jeffrey B. Fortin, Toh-Ming Lu
    Pages 1-7
  3. Jeffrey B. Fortin, Toh-Ming Lu
    Pages 9-22
  4. Jeffrey B. Fortin, Toh-Ming Lu
    Pages 23-26
  5. Jeffrey B. Fortin, Toh-Ming Lu
    Pages 27-40
  6. Jeffrey B. Fortin, Toh-Ming Lu
    Pages 41-55
  7. Jeffrey B. Fortin, Toh-Ming Lu
    Pages 57-82
  8. Jeffrey B. Fortin, Toh-Ming Lu
    Pages 83-89
  9. Back Matter
    Pages 91-102

About this book

Introduction

Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed.
This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.

Keywords

Parylene polymer polymerization polymers thin films

Authors and affiliations

  • Jeffrey B. Fortin
    • 1
    • 2
  • Toh-Ming Lu
    • 3
  1. 1.Department of Engineering ScienceRensselaer Polytechnic InstituteTroyUSA
  2. 2.GE Global Research CenterNiskayunaUSA
  3. 3.Department of PhysicsRensselaer Polytechnic InstituteTroyUSA

Bibliographic information