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Auger Electron Spectroscopy Reference Manual

A Book of Standard Spectra for Identification and Interpretation of Auger Electron Spectroscopy Data

  • G. E. McGuire

Table of contents

  1. Front Matter
    Pages i-ix
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    Pages 1-3
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    Pages 4-6
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    Pages 20-23
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    Pages 27-29
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    Pages 30-32
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    Pages 33-34
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    Pages 98-100
  34. Tin
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    Pages 101-103
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    Pages 104-106
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    Pages 107-109
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About this book

Introduction

Auger electron spectroscopy (AES) is based on the Auger total secondary electron energy distribution, and an ion gun to process, which involves the core-level ionization of an atom with provide depth profiling capability. subsequent deexcitation occurring by an outer-level electron de­ The high surface sensitivity of Auger spectroscopy which dictates caying to fill the core hole. The excess energy is transferred to the need for an ultrahigh-vacuum system is due to the limited and causes the ejection of another electron, which is by definition mean free path of electrons in the 0-3000 e V kinetic energy an Auger electron. The Auger electron transition, denoted by range. The Auger peaks decay exponentially with overlayer cov­ the electron levels involved, is independent of the excitation erage, which is consistent with an exponential dependence of source and leaves the atom with a constant kinetic energy. The escape probability on the depth of the parent atom. A compila­ kinetic energy is given by the differences in binding energies for tion of data from a variety of sources has been used to generate the three levels (for example, EK-E L, - EL ) minus a correction 2 an escape depth curve which falls in the range of 5-30 A in the term for the work function and electron wave function relaxation. energy range from 0 to 3000 eV. The observed escape depth does When the Auger transition occurs within a few angstroms of the not show a strong dependence on the matrix.

Keywords

AES Atom distribution electron electron spectroscopy electrons energy spectroscopy system wave

Authors and affiliations

  • G. E. McGuire
    • 1
  1. 1.Texas Instruments, Inc.DallasUSA

Bibliographic information