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Microcantilevers for Atomic Force Microscope Data Storage

  • Benjamin W. Chui

Part of the Microsystems book series (MICT, volume 1)

Table of contents

  1. Front Matter
    Pages i-xxv
  2. Benjamin W. Chui
    Pages 1-10
  3. Benjamin W. Chui
    Pages 55-72
  4. Benjamin W. Chui
    Pages 107-116
  5. Back Matter
    Pages 117-148

About this book

Introduction

Microcantilevers for Atomic Force Microscope Data Storage describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbonate surface, and piezoresistive cantilevers to read those indentations.
Microcantilevers for Atomic Force Microscope Data Storage describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback).
The primary audience for Microcantilevers for Atomic Force Microscope Data Storage is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.

Keywords

Sensor microelectromechanical system (MEMS) modeling optimization technology

Authors and affiliations

  • Benjamin W. Chui
    • 1
  1. 1.Stanford UniversityUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4615-4983-3
  • Copyright Information Kluwer Academic Publishers 1999
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4613-7262-2
  • Online ISBN 978-1-4615-4983-3
  • Series Print ISSN 1389-2134
  • Buy this book on publisher's site