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Part of the book series: The Springer International Series in Engineering and Computer Science (SECS, volume 293)
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Book Title: Ion Implantation: Basics to Device Fabrication
Authors: Emanuele Rimini
Series Title: The Springer International Series in Engineering and Computer Science
DOI: https://doi.org/10.1007/978-1-4615-2259-1
Publisher: Springer New York, NY
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eBook Packages: Springer Book Archive
Copyright Information: Springer Science+Business Media New York 1995
Hardcover ISBN: 978-0-7923-9520-1Published: 31 December 1994
Softcover ISBN: 978-1-4613-5952-4Published: 23 February 2014
eBook ISBN: 978-1-4615-2259-1Published: 27 November 2013
Series ISSN: 0893-3405
Edition Number: 1
Number of Pages: XIII, 393
Topics: Characterization and Evaluation of Materials, Inorganic Chemistry, Nuclear Physics, Heavy Ions, Hadrons