High Resolution Focused Ion Beams: FIB and its Applications

The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology

  • Jon Orloff
  • Mark Utlaut
  • Lynwood Swanson

Table of contents

  1. Front Matter
    Pages i-xi
  2. Jon Orloff, Mark Utlaut, Lynwood Swanson
    Pages 1-3
  3. Jon Orloff, Mark Utlaut, Lynwood Swanson
    Pages 5-19
  4. Jon Orloff, Mark Utlaut, Lynwood Swanson
    Pages 21-77
  5. Jon Orloff, Mark Utlaut, Lynwood Swanson
    Pages 79-121
  6. Jon Orloff, Mark Utlaut, Lynwood Swanson
    Pages 123-145
  7. Jon Orloff, Mark Utlaut, Lynwood Swanson
    Pages 147-203
  8. Jon Orloff, Mark Utlaut, Lynwood Swanson
    Pages 205-290
  9. Back Matter
    Pages 291-303

About this book

Introduction

In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us.
The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.

Keywords

liquid metals optics physics

Authors and affiliations

  • Jon Orloff
    • 1
  • Mark Utlaut
    • 2
  • Lynwood Swanson
    • 3
  1. 1.University of MarylandCollege ParkUSA
  2. 2.University of PortlandPortlandUSA
  3. 3.FIE CompanyHillsboroUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4615-0765-9
  • Copyright Information Kluwer Academic/Plenum Publishers, New York 2003
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4613-5229-7
  • Online ISBN 978-1-4615-0765-9
  • About this book