Signal Measurement and Estimation Techniques for Micro and Nanotechnology

  • Cédric Clévy
  • Micky Rakotondrabe
  • Nicolas Chaillet

Table of contents

  1. Front Matter
    Pages i-x
  2. Cédric Clévy, Micky Rakotondrabe
    Pages 1-27
  3. Ioan Alexandru Ivan, Micky Rakotondrabe, Philippe Lutz, Nicolas Chaillet
    Pages 29-69
  4. Mokrane Boudaoud, Yassine Haddab, Yann Le Gorrec
    Pages 71-91
  5. Simon D. Muntwyler, Felix Beyeler, Bradley J. Nelson
    Pages 93-131
  6. Xinyu Liu, Roxanne Fernandes, Andrea Jurisicova, Robert F. Casper, Yu Sun
    Pages 133-151
  7. Gilgueng Hwang, Juan Camilo Acosta, Hideki Hashimoto, Stephane Regnier
    Pages 153-191
  8. Back Matter
    Pages 241-242

About this book


Signal Measurement and Estimation Techniques for Micro and Nanotechnology discusses micro, nano and robotic cells and gives a state-of-the-art  presentation of the different techniques and solutions to measure and estimate  signals at the micro and nano scale. New technologies and applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS) and material and surface force characterization are covered. The importance of sensing at the micro and nano scale is presented as a key issue in control systems, as well as for understanding the physical phenomena of these systems. This book also: 

  • Explains issues that make signal measurement and estimation techniques difficult at the micro-nano-scale and offers solutions   
  • Discusses automated micro-assembly, and control of micro-nano robotic devices
  • Presents and links signal measurement and estimation techniques for  micro-nano scale systems with microfabrication methods, sensors integration and control schemes

Signal Measurement and Estimation Techniques for Micro and  Nanotechnology is a must-read for researchers and engineers working in MEMS and control systems.


Control of Piezoelectric Microactuators Estimation Techniques MEMS Microactuators Microrobotics Signal Measurement nanosystems

Editors and affiliations

  • Cédric Clévy
    • 1
  • Micky Rakotondrabe
    • 2
  • Nicolas Chaillet
    • 3
  1. 1.ENSMM/UTBM, AS2M DepartmentFEMTO-ST Institute, UMR CNRS 6174 - UFCBesançonFrance
  2. 2., ENSMM / UTBMFEMTO-ST Institute, UMR CNRS 6174 - UFCBesançonFrance
  3. 3.FEMTO-ST InstituteBesançonFrance

Bibliographic information

  • DOI
  • Copyright Information Springer Science+Business Media, LLC 2011
  • Publisher Name Springer, New York, NY
  • eBook Packages Engineering
  • Print ISBN 978-1-4419-9945-0
  • Online ISBN 978-1-4419-9946-7
  • Buy this book on publisher's site