Microelectronic Test Structures for CMOS Technology

  • Manjul Bhushan
  • Mark B. Ketchen

Table of contents

  1. Front Matter
    Pages i-xxxiv
  2. Manjul Bhushan, Mark B. Ketchen
    Pages 1-10
  3. Manjul Bhushan, Mark B. Ketchen
    Pages 11-65
  4. Manjul Bhushan, Mark B. Ketchen
    Pages 67-105
  5. Manjul Bhushan, Mark B. Ketchen
    Pages 107-138
  6. Manjul Bhushan, Mark B. Ketchen
    Pages 139-172
  7. Manjul Bhushan, Mark B. Ketchen
    Pages 173-229
  8. Manjul Bhushan, Mark B. Ketchen
    Pages 231-257
  9. Manjul Bhushan, Mark B. Ketchen
    Pages 259-290
  10. Manjul Bhushan, Mark B. Ketchen
    Pages 291-315
  11. Manjul Bhushan, Mark B. Ketchen
    Pages 317-358
  12. Back Matter
    Pages 359-373

About this book

Introduction

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing. In this timely volume, IBM scientists Manjul Bhushan and Mark Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance and characteristics of MOSFETs and other circuit elements.  Detailed examples are presented throughout, many of which are equally applicable to other microelectronic technologies as well. The authors’ overarching goal is to provide students and technology practitioners alike a practical guide to the disciplined design and use of test structures that give unambiguous information on the parametrics and performance of digital CMOS technology.

Keywords

Bhushan CMOS CMOS Process CMOS technology Circuit design Ketchen Manjul Bhushan Manufacturability Mark B. Ketchen Microelectronics Microelectronics test structures Silicon chip design Silicon chip manufacturing Silicon fabrication Silicon manufacturing Test processes Test structures VLSI circuit design

Authors and affiliations

  • Manjul Bhushan
    • 1
  • Mark B. Ketchen
    • 2
  1. 1.IBM Systems & Technology GroupHopewell JunctionUSA
  2. 2.T.J. Watson Research CenterIBMYorktown HeightsUSA

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4419-9377-9
  • Copyright Information Springer Science+Business Media, LLC 2011
  • Publisher Name Springer, New York, NY
  • eBook Packages Engineering
  • Print ISBN 978-1-4419-9376-2
  • Online ISBN 978-1-4419-9377-9
  • About this book