MEMS Materials and Processes Handbook

  • Reza Ghodssi
  • Pinyen Lin

Part of the MEMS Reference Shelf book series (MEMSRS, volume 1)

Table of contents

  1. Front Matter
    Pages i-xxxv
  2. Tina L. Lamers, Beth L. Pruitt
    Pages 1-36
  3. Christian A. Zorman, Robert C. Roberts, Li Chen
    Pages 37-136
  4. David P. Arnold, Monika Saumer, Yong-Kyu Yoon
    Pages 137-191
  5. Ellis Meng, Xin Zhang, William Benard
    Pages 193-271
  6. Ronald G. Polcawich, Jeffrey S. Pulskamp
    Pages 273-353
  7. Takashi Mineta, Yoichi Haga
    Pages 355-402
  8. Srinivas Tadigadapa, Franz Lärmer
    Pages 403-456
  9. David W. Burns
    Pages 457-665
  10. Daniel R. Hines, Nathan P. Siwak, Lance A. Mosher, Reza Ghodssi
    Pages 667-753
  11. Alan D. Raisanen
    Pages 755-815
  12. Shawn J. Cunningham, Mario Kupnik
    Pages 817-877
  13. Ann Garrison Darrin, Robert Osiander
    Pages 879-923
  14. Pinyen Lin, Roya Maboudian, Carlo Carraro, Fan-Gang Tseng, Pen-Cheng Wang, Yongqing Lan
    Pages 925-1044
  15. Michael A. Huff, Stephen F. Bart, Pinyen Lin
    Pages 1045-1181
  16. Back Matter
    Pages 1183-1187

About this book


MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.


Editors and affiliations

  • Reza Ghodssi
    • 1
  • Pinyen Lin
    • 2
  1. 1.Dept. Electrical &, Computer EngineeringUniversity of MarylandCollege ParkUSA
  2. 2.Xerox Research CenterWebsterUSA

Bibliographic information

  • DOI
  • Copyright Information Springer Science+Business Media, LLC 2011
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-0-387-47316-1
  • Online ISBN 978-0-387-47318-5
  • Series Print ISSN 1936-4407
  • Buy this book on publisher's site