BioNanoFluidic MEMS

  • Peter J. Hesketh

Part of the MEMS Reference Shelf book series (MEMSRS)

Table of contents

  1. Front Matter
    Pages I-X
  2. James D. Meindl
    Pages 1-9
  3. Chenguo Hu, Hong Liu, Zhong Lin Wang
    Pages 11-36
  4. Raghunath Murali
    Pages 37-62
  5. Harry D. Rowland, William P. King
    Pages 131-151
  6. David W. Rosen
    Pages 175-196
  7. Gary W. Hunter, Jennifer C. Xu, Darby B. Makel
    Pages 197-231
  8. Amir G. Ahmadi, Sankar Nair
    Pages 233-250
  9. Joseph L. Charest, William P. King
    Pages 251-277
  10. Ravi Doraiswami
    Pages 279-289
  11. Back Matter
    Pages 291-295

About this book

Introduction

BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:

  • BioNanoFluidic MEMS connection between the interdisciplinary nature of
    BioNanoFluidics and MEMS
     
  • BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies

  • Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others

  • Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS

  • BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
  • Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others

  • Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration

"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."

STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus

Keywords

BioNanoFluidic Biosensor Hesketh MEMS biomaterial material nanostructure nanotechnology temperature testing

Editors and affiliations

  • Peter J. Hesketh
    • 1
  1. 1.George W. Woodruff School of Mechanical EngineeringGeorgia Institute of TechnologyAtlanta

Bibliographic information

  • DOI https://doi.org/10.1007/978-0-387-46283-7
  • Copyright Information Springer Science+Business Media, LLC 2008
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering
  • Print ISBN 978-0-387-46281-3
  • Online ISBN 978-0-387-46283-7
  • Series Print ISSN 1936-4407
  • About this book