Overview
- Comprehensively treats the major characterization techniques used to analyze thin films from the micro- to nanoscale
- Incorporates the use of x-ray fluorescence (XRF) in thin film analysis
- Focuses on surface analysis and includes analytical techniques such as XRF, XRD, and electron microscopy
- Offers a modern version (with a nano focus) on the well regarded 1986 book, "Surface and Thin Film Analysis" written by Feldman and Mayer
- Includes supplementary material: sn.pub/extras
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Table of contents (14 chapters)
Keywords
About this book
Modern science and technology, from materials science to integrated circuit development, is directed toward the nanoscale. From thin films to field effect transistors, the emphasis is on reducing dimensions from the micro to the nanoscale. Fundamentals of Nanoscale Film Analysis concentrates on analysis of the structure and composition of the surface and the outer few tens to hundred nanometers in depth. It describes characterization techniques to quantify the structure, composition and depth distribution of materials with the use of energetic particles and photons.
The book describes the fundamentals of materials characterization from the standpoint of the incident photons or particles which interrogate nanoscale structures. These induced reactions lead to the emission of a variety of detected of particles and photons. It is the energy and intensity of the detected beams that is the basis of the characterization of the materials. The array of experimental techniques used in nanoscale materials analysis covers a wide range of incident particle and detected beam interactions.
Included are such important interactions as atomic collisions, Rutherford backscattering, ion channeling, diffraction, photon absorption, radiative and nonradiative transitions, and nuclear reactions. A variety of analytical and scanning probe microscopy techniques are presented in detail.
Authors and Affiliations
Bibliographic Information
Book Title: Fundamentals of Nanoscale Film Analysis
Authors: Terry L. Alford, Leonard C. Feldman, James W. Mayer
DOI: https://doi.org/10.1007/978-0-387-29261-8
Publisher: Springer New York, NY
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag US 2007
Hardcover ISBN: 978-0-387-29260-1Published: 16 February 2007
Softcover ISBN: 978-1-4419-3980-7Published: 29 October 2010
eBook ISBN: 978-0-387-29261-8Published: 03 April 2007
Edition Number: 1
Number of Pages: XIV, 336
Topics: Characterization and Evaluation of Materials, Surfaces and Interfaces, Thin Films, Nanotechnology, Solid State Physics, Spectroscopy and Microscopy, Condensed Matter Physics