Overview
- The first, comprehensive handbook on the foundations and modern applications of ellipsometry
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About this book
Ever progressive miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research are propelling ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, to greater popularity in a widening array of applications. Ellipsometry, without contact and non-damaging to samples, is an ideal measurement technique to determine optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications occurring today, this book provides a much needed foundation of the science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, fiber optics, biotechnology, and pharmaceuticals. Divided into four sections, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas.
Keywords
Table of contents (12 chapters)
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Front Matter
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Theory of Ellipsometry
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Front Matter
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Critical Reviews of Some Applications
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Front Matter
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Emerging Areas in Ellipsometry
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Front Matter
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Back Matter
Editors and Affiliations
About the editors
About The Editors:
Harland Tompkins is a consultant with more than thirty years experience in thin films for microelectronics, applied surface science, and vacuum technology. With a Ph.D. in physics from the University of Wisconsin-Milwaukee, he previously worked 12 years at Bell Laboratories and 16 years at Motorola. He has authored more than 75 technical papers and two other best selling books on ellipsometry, one at an introductory level for casual users and the other an intermediate book for process engineers. He is a Fellow of the AVS.
Eugene Irene, a Ph.D. from Rensselaer Polytechnic Institute, is Professor of Chemistry at the University of North Carolina, Chapel Hill. He began his academic career in 1982 after 10 years experience at IBM’s Thomas J. Watson Research Center. He is the author of over 230 publications in the areas of thin films and dielectrics and is the recipient of several awards. He is a Fellow of the AVS.
Bibliographic Information
Book Title: Handbook of Ellipsometry
Editors: Harland G. Tompkins, Eugene A. Irene
DOI: https://doi.org/10.1007/3-540-27488-X
Publisher: Springer Berlin, Heidelberg
eBook Packages: Chemistry and Materials Science, Chemistry and Material Science (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2005
Edition Number: 1
Number of Pages: XVI, 870
Additional Information: Jointly published with William Andrew Publishing, Norwich, NY, USA
Topics: Optical and Electronic Materials, Surfaces and Interfaces, Thin Films, Measurement Science and Instrumentation, Optics, Lasers, Photonics, Optical Devices, Nanotechnology