Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures

  • Joachim Frühauf

About this book

Introduction

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.

Keywords

Design of etch masks and processes Microfluidics Micromechanics Microoptics Microtechnologies Sensor Silicon Etching Silicon Microstructures sensors

Authors and affiliations

  • Joachim Frühauf
    • 1
  1. 1.Fakultät für Elektrotechnik und Informationstechnik Fachgruppe Werkstoffe der Elektrotechnik/ElektronikTechnische Universität ChemnitzChemnitzGermany

Bibliographic information

  • DOI https://doi.org/10.1007/b138230
  • Copyright Information Springer-Verlag Berlin Heidelberg 2005
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-540-22109-8
  • Online ISBN 978-3-540-26876-5
  • About this book