Overview
Written by leading authorities on the subject
One of the major laser sources in Physics, Chemistry and Medicine
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Table of contents (31 chapters)
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Applications
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Back Matter
Keywords
About this book
This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology.
Additional chapters on optics, devices and laser systems complete this compact handbook.
A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
Reviews
From the reviews:
"This book is one of the few books devoted to excimer lasers and their applications. … anyone working in the field of lasers or materials processing can take advantage of it. The editor has done the effort to include a list of abbreviations and also an alphabetic register, which enhances the usefulness of the book. The quality of printing and layout is perfect." (Erik Stijns, Physicalia, Vol. 28 (4-6), 2006)
Editors and Affiliations
Bibliographic Information
Book Title: Excimer Laser Technology
Editors: Dirk Basting, Gerd Marowsky
DOI: https://doi.org/10.1007/b137894
Publisher: Springer Berlin, Heidelberg
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2005
Hardcover ISBN: 978-3-540-20056-7Published: 21 April 2005
Softcover ISBN: 978-3-642-05749-6Published: 13 October 2010
eBook ISBN: 978-3-540-26667-9Published: 05 December 2005
Edition Number: 1
Number of Pages: XX, 433
Topics: Optics, Lasers, Photonics, Optical Devices, Physical Chemistry, Measurement Science and Instrumentation, Engineering, general