Excimer Laser Technology

  • Dirk Basting
  • Gerd Marowsky

Table of contents

  1. Front Matter
    Pages I-XIX
  2. D. Basting, G. Marowsky
    Pages 1-7
  3. D. Basting, N. Djeu, K. Jain
    Pages 8-21
  4. Stephen G. Anderson
    Pages 22-29
  5. Fundamentals

    1. K. Körber, C. Kulik
      Pages 33-40
    2. H. von Bergmann, U. Stamm
      Pages 41-45
    3. H. von Bergmann, U. Rebhan, U. Stamm
      Pages 47-73
    4. H. von Bergmann
      Pages 75-80
    5. V. Borisov, I. Bragin
      Pages 81-88
    6. R. Pätzel, U. Stamm
      Pages 89-103
    7. K. Mann
      Pages 105-117
    8. N. Kaiser, H. Lauth, H. Bernitzki
      Pages 119-126
    9. P. Oesterlin, A. Koch
      Pages 127-136
  6. Applications

    1. M. Wehner
      Pages 139-147
    2. M Wehner
      Pages 149-154
    3. M. Wehner, J. Ihlemann
      Pages 155-186
    4. M. Hessling, J. Ihlemann
      Pages 187-200
    5. B. Keiper, T. Petsch, H. Exner
      Pages 201-219
    6. J.-H. Klein-Wiele, J. Bekesi, J. Ihlemann, P. Simon
      Pages 279-283

About this book


 This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F laser technology. 

Additional chapters on optics, devices and laser systems complete this compact handbook.

A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.


Technologie Trend biophotonics design development glass laser laser physics laser technology material optics photonics physics technology temperature

Editors and affiliations

  • Dirk Basting
    • 1
  • Gerd Marowsky
    • 2
  1. 1.Fort LauderdaleUSA
  2. 2.Laser-Laboratorium Göttingen e.V.GöttingenGermany

Bibliographic information

  • DOI https://doi.org/10.1007/b137894
  • Copyright Information Springer-Verlag Berlin Heidelberg 2005
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-3-540-20056-7
  • Online ISBN 978-3-540-26667-9
  • About this book