Table of contents

  1. Front Matter
  2. Giovanna Scarel, Axel Svane, Marco Fanciulli
    Pages 1-14
  3. Jani Päiväsaari, Jaakko Niinistö, Pia Myllymäki, Chuck Dezelah IV, Charles H. Winter, Matti Putkonen et al.
    Pages 15-32
  4. Raffaella Lo Nigro, Graziella Malandrino, Roberta G. Toro, Ignazio L. Fragalà
    Pages 33-51
  5. Ola Nilsen, Martin Lie, Helmer F. Fjellvåg, Arne Kjekshus
    Pages 87-100
  6. H. Jörg Osten, Eberhard Bugiel, Malte Czernohorsky, Zeyard Elassar, Olaf Kirfel, Andreas Fissel
    Pages 101-114
  7. Yuri Lebedinskii, Andrei Zenkevich, Giovanna Scarel, Marco Fanciulli
    Pages 127-142
  8. Sabina Spiga, Claudia Wiemer, Giovanna Scarel, Omar Costa, Marco Fanciulli
    Pages 203-223
  9. Pietro Delugas, Vincenzo Fiorentini, Alessio Filippetti
    Pages 225-246
  10. Jarek Da̧browski, Andrzej Fleszar, Gunther Lippert, Grzegorz Lupina, Anil Mane, Christian Wenger
    Pages 247-268
  11. Gabriele Seguini, Michele Perego, Marco Fanciulli
    Pages 269-283
  12. John Robertson, Ka Xiong
    Pages 313-329
  13. Leon Petit, Axel Svane, Zdzislawa Szotek, Walter M. Temmerman
    Pages 331-343

About this book

Introduction

Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications.

Keywords

Deposition methods EELS Experiment High-k dielectrics Microelectronics PED REM Rare earth oxides microscopy semiconductor spectroscopy spintronics thin film thin films transmission electron microscopy

Bibliographic information

  • DOI https://doi.org/10.1007/b137342
  • Copyright Information Springer-Verlag Berlin/Heidelberg 2007
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Physics and Astronomy
  • Print ISBN 978-3-540-35796-4
  • Online ISBN 978-3-540-35797-1
  • Series Print ISSN 0303-4216
  • Series Online ISSN 1437-0859