Book 2006

MEMS/NEMS

Handbook Techniques and Applications

Editors:

ISBN: 978-0-387-24520-1 (Print) 978-0-387-25786-0 (Online)

Table of contents (43 chapters)

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  1. Front Matter

    Pages i-xviii

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    Chapter

    Pages 1-34

    Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices

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    Chapter

    Pages 35-71

    Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

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    Chapter

    Pages 73-109

    Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

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    Chapter

    Pages 111-150

    Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications

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    Chapter

    Pages 151-172

    Techniques in Global Optimal Design for MEMS & Their Applications

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    Chapter

    Pages 173-195

    Theory and Design of Micromechanical Vibratory Gyroscopes

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    Chapter

    Pages 197-234

    A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS)

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    Chapter

    Pages 235-291

    Techniques in Electrostatics Analysis of MEMS and Their Applications

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    Chapter

    Pages 293-334

    Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems

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    Chapter

    Pages 335-352

    Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications

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    Chapter

    Pages 353-382

    Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications

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    Chapter

    Pages 383-443

    GaAs Thermally Based MEMS Devices—Fabrication Techniques, Characterization and Modeling

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    Chapter

    Pages 444-472

    Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements’

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    Chapter

    Pages 473-503

    Hydrogel-based μTAS

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    Chapter

    Pages 504-552

    Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication

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    Chapter

    Pages 553-615

    MEMS/NEMS Techniques and Applications

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    Chapter

    Pages 616-677

    Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology

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    Chapter

    Pages 678-740

    Tool-based Micro Machining and Applications in MEMS

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    Chapter

    Pages 741-800

    Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application

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    Chapter

    Pages 801-869

    Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices

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