About this book


The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.


molecule semiconductor semiconductors surface

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag 1999
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-540-65007-2
  • Online ISBN 978-3-540-49773-8
  • Series Print ISSN 0081-3869
  • Series Online ISSN 1615-0430
  • Buy this book on publisher's site