About this book
This book discusses the recent research developments of various passive microwave circuits on silicon substrate and demonstrated operations catering for multiple frequency bands. It covers the design, modelling, process fabrication and characterization aspects with practical examples. The book will be of use to researchers and engineers working in the field of RF or microwave engineering, who can use the techniques and approaches effectively without having to refer to multiple sources.
Silicon Radio Frequency Micromachining Planar RF topology RF-MEMS Antenna on Silicon Fabrication technologies Planar Antenna
Springer Nature Singapore Pte Ltd. 2019
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