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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

  • Toan Dinh
  • Nam-Trung Nguyen
  • Dzung Viet Dao

Part of the SpringerBriefs in Applied Sciences and Technology book series (BRIEFSAPPLSCIENCES)

Table of contents

  1. Front Matter
    Pages i-xi
  2. Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
    Pages 1-9
  3. Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
    Pages 11-41
  4. Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
    Pages 43-53
  5. Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
    Pages 55-74
  6. Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
    Pages 75-83
  7. Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
    Pages 85-106
  8. Toan Dinh, Nam-Trung Nguyen, Dzung Viet Dao
    Pages 107-115

About this book

Introduction

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

Keywords

Thermoresistance Temperature Coefficient of Resistance Junction Temperature Sensors Thermal Flow Sensors Convective Accelerometers Convective Gyroscopes

Authors and affiliations

  • Toan Dinh
    • 1
  • Nam-Trung Nguyen
    • 2
  • Dzung Viet Dao
    • 3
  1. 1.Queensland Micro- and Nanotechnology Centre (QMNC)Griffith UniversityBrisbaneAustralia
  2. 2.Queensland Micro- and Nanotechnology Centre (QMNC)Griffith UniversityBrisbaneAustralia
  3. 3.School of Engineering and Built EnvironmentGriffith UniversitySouthportAustralia

Bibliographic information

  • DOI https://doi.org/10.1007/978-981-13-2571-7
  • Copyright Information The Author(s) 2018
  • Publisher Name Springer, Singapore
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-981-13-2570-0
  • Online ISBN 978-981-13-2571-7
  • Series Print ISSN 2191-530X
  • Series Online ISSN 2191-5318
  • Buy this book on publisher's site