Advanced Technologies Based on Wave and Beam Generated Plasmas

Posters

1. The Anisotropic Etching of Silicon in CF4, CF4 + H2 and CF4-XCLX Plasma

   • Ž. Rutkūnienė, A. Grigonis, R. Knizikevičius

   Pages 469-470

2. CF2 Production by CF4 Electron Impact Dissociation in Gas Discharge

   • V. V. Ivanov, K. S. Klopovskiy, D. V. Lopaev, O. V. Proshina, A. T. Rakhimov, T. V. Rakhimova

   Pages 471-472

3. On Negative Ions Langmuir Probe Measurements in an Ar + 4%CF4 Currentless Plasma

   • T. Popov, D. Ivanova, M. Tchernookov

   Pages 473-474

4. Plasma Treatment of Polymer Surfaces in Different Gases

   • D. M. Svirachev, N. A. Tabaliov

   Pages 475-476

5. Plasma treatment of polymer surfaces in gas mixture

   • D. M. Svirachev, N. A. Tabaliov

   Pages 477-478

6. Field Emission Characteristics of Thin MPCVD Diamond Films

   • J. Engemann, G. Fedosenko, V. Raiko, D. Theirich

   Pages 479-480

7. Technological Method of Substratum Metallization by Plasma-Arc Deposition

   • A. V. Kostrov, V. I. Gundorin, A. V. Strikovsky

   Pages 481-482

8. Hydrodynamic and Electrical Characterization of a Corona Discharge Plasma Reactor

   • S. Robert, E. Francke, J. Amouroux

   Pages 483-484

9. Study by Mass Spectrometry and Gas Chromatography of Fluorocarbon Waste Destruction in a Low-Pressure Plasma Reactor

   • F. Genet, S. Cavadias, K. Coulibaly, M. F. Gonnord, J. Amouroux

   Pages 485-486

10. Cars Applied to Plasmas for NO-Reduction

    • T. Doerk, A. Dogan, A. Pott, J. Uhlenbusch, J. Höschele, J. Steinwandel et al.

    Pages 487-488

11. Heating and Melting of the Dust Crystal in a RF Discharge. Non-Linear Analysis

    • I. V. Schweigert, V. A. Schweigert, A. Melzer, A. Homann, A. Piel

    Pages 489-490

12. Intense Plasma Pulses in Doping, Coating and Glazing the Surface of Solid Materials

    • J. Langner, J. Piekoszewski, J. Stanisławski

    Pages 491-492

13. Monoatomic Ion Rich DECR Plasmas for Ion Implantation by Plasma Immersion Using a New High Voltage — High Current Pulse Generator

    • F. Le Coeur, Y. Arnal, J. Pelletier, O. Lesaint, O. Maulat, M. Roche

    Pages 493-494

14. Spatial Distribution and Kinetics of Negative Ions in Glow DC Discharge in Pure O2 and H2

    • V. V. Ivanov, K. S. Klopovskiy, D. V. Lopaev, A. T. Rakhimov, T. V. Rakhimova

    Pages 495-496

15. Diffusion and Wall Loss of Magnesium in Decaying Plasma

    • I. Rusinov, A. Blagoev, M. Pentcheva, V. Yordanov

    Pages 497-498

16. Diffusion and Depopulation of the Metastable Cd 3 P0,2 States in Collisions with Neon Atoms

    • A. I. Ogoyski, A. B. Blagoev

    Pages 499-500

17. Non-Local Regime of Self-Consistency in Stationary Waveguided Discharges

    • KH. Tarnev

    Pages 501-502

18. Symmetric Mode in a Planar Plasma Waveguide: Numerical Study of Nonlinear Effects

    • M. N. Georgieva-Grosse, S. Grosse

    Pages 503-504

19. Modulation Instabilities of Surface-Wave Sustained Discharges

    • M. Böke, D. Grozev, G. Himmel, K. Kirov, H. Schlüter, A. Shivarova

    Pages 505-506

20. Correlation and Spectrum Analysis of Instabilities in Waveguided Discharges

    • N. Djermanova, K. Kirov

    Pages 507-508