Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

  • Orlando Auciello
  • Jürgen Engemann

Part of the NATO ASI Series book series (NSSE, volume 234)

Table of contents

  1. Front Matter
    Pages i-xv
  2. J. C. Moreno-Marin, A. Gras-Marti, O. Auciello
    Pages 115-120
  3. M. Andritschky, V. Teixeira
    Pages 145-149
  4. T. Venkatesan, S. Bhattacharya, C. Doughty, A. Findikoglu, C. Kwon, Qi Li et al.
    Pages 209-238
  5. A. R. Krauss, M. Rangaswamy, Y. Lin, D. M. Gruen, J. A. Schultz, H. K. Schmidt et al.
    Pages 251-281
  6. T. Koga, J. H. Xu, B. M. Moon, K. V. Rao
    Pages 369-374
  7. T. A. Roberts, J. M. Grace, D. B. McDonald, K. E. Gray, R. P. H. Chang
    Pages 395-399
  8. D. C. Houghton, J.-P. Noël, N. L. Rowell, D. D. Perovic
    Pages 401-444
  9. S. L. Hsia, T. Y. Tan, P. L. Smith, G. E. McGuire
    Pages 523-526
  10. F. Meyer, Y. Lemeur, C. Schwebel, C. Pellet, P. Möller, A. Buxbaum et al.
    Pages 527-532
  11. S. Luby, E. Majkova, V. Daniska, R. Senderak, E. D’ Anna, G. Leggieri et al.
    Pages 545-549
  12. Z. Z. Ozturk, A. Altindal, H. Yuzer
    Pages 557-560
  13. S. B. Krupanidhi
    Pages 601-625
  14. K. Saitoh, M. Hatano, T. Nishino
    Pages 627-630
  15. Back Matter
    Pages 631-633

About this book


The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices.
This book contains the lectures and contributed papers on various scientific and technological aspects of multicomponent and multilayered thin films presented at a NATO/ASI. Compared to other recent books on thin films, the distinctive character of this book is the interdisciplinary treatment of the various fields of research related to the different thin film materials mentioned above. The wide range of topics discussed in this book include vacuum-deposition techniques, synthesis-processing, characterization, and devices of multicomponent/multilayered oxide high temperature superconducting, ferroelectric, electro-optic, optical, metallic, silicide, and compound semiconductor thin films.
The book presents an unusual intedisciplinary exchange of ideas between researchers with cross-disciplinary backgrounds and it will be useful to established investigators as well as postdoctoral and graduate students.


crystal electron microscopy metal microscopy modeling spectroscopic analysis thin film

Editors and affiliations

  • Orlando Auciello
    • 1
  • Jürgen Engemann
    • 2
  1. 1.MCNC, Center for MicroelectronicsSystem TechnologiesResearch Triangle ParkUSA
  2. 2.Microstructure Research CenterUniversity of WuppertalWuppertalGermany

Bibliographic information

  • DOI
  • Copyright Information Kluwer Academic Publishers 1993
  • Publisher Name Springer, Dordrecht
  • eBook Packages Springer Book Archive
  • Print ISBN 978-94-010-4757-9
  • Online ISBN 978-94-011-1727-2
  • Series Print ISSN 0168-132X
  • Buy this book on publisher's site