Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

  • Yves Pauleau

Part of the NATO Science Series book series (NAII, volume 55)

Table of contents

  1. Front Matter
    Pages i-xiii
  2. T. P. Cassagneau
    Pages 19-42
  3. D. Sporn, P. Löbmann, U. Guntow, W. Glaubitt
    Pages 69-89
  4. G. Wahl, J. Arndt, O. Stadel
    Pages 145-170
  5. J. Holleman
    Pages 171-198
  6. S. J. C. Irvine
    Pages 199-222
  7. D. Tonneau, N. Clement, A. Houel, N. Bonnail, H. Dallaporta, V. Safarov
    Pages 255-281
  8. Charles M. Gilmore, James A. Sprague
    Pages 283-307
  9. W. Gulbiński
    Pages 309-333
  10. L. Pranevicius, C. Templier, J.-P. Riviere, S. Muzard, J. Dudonis, L. L. Pranevicius et al.
    Pages 335-360
  11. Back Matter
    Pages 361-363

About this book


An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes.

A handbook for engineers and scientists and an introduction for students of microelectronics.


Epitaxy Helium-Atom-Streuung chemistry laser metal simulation vapor

Editors and affiliations

  • Yves Pauleau
    • 1
  1. 1.School of Electrochemical and Electrometallurgical EngineeringNational Polytechnic Institute of GrenobleGrenobleFrance

Bibliographic information

  • DOI
  • Copyright Information Kluwer Academic Publishers 2002
  • Publisher Name Springer, Dordrecht
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4020-0525-1
  • Online ISBN 978-94-010-0353-7
  • Series Print ISSN 1568-2609
  • Buy this book on publisher's site