Introduction to Micromechanisms and Microactuators

  • Amitabha Ghosh
  • Burkhard Corves

Part of the Mechanisms and Machine Science book series (Mechan. Machine Science, volume 28)

Table of contents

  1. Front Matter
    Pages i-xv
  2. Amitabha Ghosh, Burkhard Corves
    Pages 1-30
  3. Amitabha Ghosh, Burkhard Corves
    Pages 31-37
  4. Amitabha Ghosh, Burkhard Corves
    Pages 39-49
  5. Amitabha Ghosh, Burkhard Corves
    Pages 51-56
  6. Amitabha Ghosh, Burkhard Corves
    Pages 57-79
  7. Amitabha Ghosh, Burkhard Corves
    Pages 81-96
  8. Amitabha Ghosh, Burkhard Corves
    Pages 97-131
  9. Amitabha Ghosh, Burkhard Corves
    Pages 133-153
  10. Back Matter
    Pages 155-161

About this book


This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.


MEMS Machine Dynamics Machine Engineering Mechanism Design Microactuators Microfabrication Micromechanisms Microsystems

Authors and affiliations

  • Amitabha Ghosh
    • 1
  • Burkhard Corves
    • 2
  1. 1.Aerospace Engineering and Applied MechanIndian Institute of Engineering Science and Technology, ShibpurHowrahIndia
  2. 2.University AachenRWTH AachenAachenGermany

Bibliographic information

  • DOI
  • Copyright Information Springer India 2015
  • Publisher Name Springer, New Delhi
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-81-322-2143-2
  • Online ISBN 978-81-322-2144-9
  • Series Print ISSN 2211-0984
  • Series Online ISSN 2211-0992
  • Buy this book on publisher's site