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© 2020

Case Studies in Micromechatronics

From Systems to Processes

Textbook

Table of contents

  1. Front Matter
    Pages i-vii
  2. Stephanus Büttgenbach, Iordania Constantinou, Andreas Dietzel, Monika Leester-Schädel
    Pages 1-19
  3. Stephanus Büttgenbach, Iordania Constantinou, Andreas Dietzel, Monika Leester-Schädel
    Pages 21-85
  4. Stephanus Büttgenbach, Iordania Constantinou, Andreas Dietzel, Monika Leester-Schädel
    Pages 87-144
  5. Stephanus Büttgenbach, Iordania Constantinou, Andreas Dietzel, Monika Leester-Schädel
    Pages 145-209
  6. Stephanus Büttgenbach, Iordania Constantinou, Andreas Dietzel, Monika Leester-Schädel
    Pages 211-274
  7. Stephanus Büttgenbach, Iordania Constantinou, Andreas Dietzel, Monika Leester-Schädel
    Pages 275-294
  8. Back Matter
    Pages 295-298

About this book

Introduction

The book “Case Studies in Micromechatronics – From Systems to Processes” describes prominent example applications of micromechatronic systems along with their enabling fabrication technologies. The chosen examples represent five main fields of application: consumer electronics, mobility and navigation, handling technology and automation, laboratory diagnostics, and biomedical technology. The example systems are made from different materials, requiring a large variety of modern fabrication methods and design rules, which are also explained in detail. As a result, an inverted introduction - from prominent applications to base technologies - is provided. Example applications are selected to offer a broad overview of the development environment of micromechatronic systems, including established as well as cutting-edge microfabrication technologies.

 

The content

Introduction - Piezoresistive pressure sensors - Surface micromachined acceleration sensors - Mechanical microgrippers - Point-of-care diagnostic systems - Flexible and stretchable sensor arrays

 

The target groups

The text would be valuable for graduate and undergraduate students as well as for engineers in the field.

 

The authors

Prof. Dr. Stephanus Büttgenbach is a professor emeritus at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research are silicon micromachining, quartz technology, MEMS-CAD, microactuators, microsensors, lab-on-chip systems, and microreactors.

Prof. Dr. Iordania Constantinou is a junior professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her fields of research include amorphous semiconductors, organic electronics, micro- and nanosensors, and microfluidics.

Prof. Dr. Andreas Dietzel is a professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research include systems in foil, laser microstructuring, point-of-care systems, MagMEMS, MEMS simulation, and the design and fabrication of microfluidic systems with applications in life sciences.

Dr.-Ing. Monika Leester-Schädel is an academic senior councilor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her special fields of work are micromechatronics, sensor systems for aerospace, and microactuators.

 


Keywords

mems microactuators microfluidic micromechatronics microsensors microsystems

Authors and affiliations

  1. 1.Technische Universität BraunschweigBraunschweigGermany
  2. 2.Technische Universität BraunschweigBraunschweigGermany
  3. 3.Technische Universität BraunschweigBraunschweigGermany
  4. 4.Technische Universität BraunschweigBraunschweigGermany

About the authors

Prof. Dr. Stephanus Büttgenbach is a professor emeritus at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research are silicon micromachining, quartz technology, MEMS-CAD, microactuators, microsensors, lab-on-chip systems, and microreactors.

Prof. Dr. Iordania Constantinou is a junior professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her fields of research include amorphous semiconductors, organic electronics, micro- and nanosensors, and microfluidics.

Prof. Dr. Andreas Dietzel is a professor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. His fields of research include systems in foil, laser microstructuring, point-of-care systems, MagMEMS, MEMS simulation, and the design and fabrication of microfluidic systems with applications in life sciences.

Dr.-Ing. Monika Leester-Schädel is an academic senior councilor at the Institute of Microtechnology, Technische Universität Braunschweig, Germany. Her special fields of work are micromechatronics, sensor systems for aerospace, and microactuators.

 

Bibliographic information