Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

  • Xiao-Sheng¬†Zhang

Part of the Springer Theses book series (Springer Theses)

Table of contents

  1. Front Matter
    Pages i-xx
  2. Xiao-Sheng Zhang
    Pages 1-21
  3. Xiao-Sheng Zhang
    Pages 119-122

About this book


This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties.  Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.


Flexible Material Improved DRIE Process Micro/Nano Hierarchical Structures Micro/Nano Integrated Fabrication Microenergy Source Nanogenerator Silicon Soft Lithography

Authors and affiliations

  • Xiao-Sheng¬†Zhang
    • 1
  1. 1.Institute of MicroelectronicsPeking UniversityBeijingChina

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2016
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering
  • Print ISBN 978-3-662-48814-0
  • Online ISBN 978-3-662-48816-4
  • Series Print ISSN 2190-5053
  • Series Online ISSN 2190-5061
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