Shape Memory Microactuators

  • Manfred Kohl

Part of the Microtechnology and MEMS book series (MEMS)

Table of contents

  1. Front Matter
    Pages I-XIX
  2. Manfred Kohl
    Pages 1-4
  3. Manfred Kohl
    Pages 5-24
  4. Manfred Kohl
    Pages 25-61
  5. Manfred Kohl
    Pages 62-95
  6. Manfred Kohl
    Pages 96-160
  7. Manfred Kohl
    Pages 161-218
  8. Manfred Kohl
    Pages 219-221
  9. Back Matter
    Pages 223-247

About this book


Since the beginning of the nineties, shape memory alloys (SMA) have become available for microsystems technology. Currently the breadth of research and development activities on SMA microactuators ranges from pure scientific topics of materials research to technological problems, such as micromachining, integration and contacting. The book gives an overview of recent achievements, describing the development of microvalves and linear actuators comprehensively from concept through prototype. Further key aspects included are three-dimensional models for handling complex SMA actuator geometries and coupled simulation routines that take multifunctional properties into account. Mechanical and thermal optimization criteria are introduced for actuator design, allowing an optimum use of the shape memory effect. It is shown that some of the prototypes presented, e.g. SMA microgrippers, already outperform conventional components.


Coupled field simulation Macromodelling Microactuators Microtechnologies Shape memory alloys actuator optimization simulation

Authors and affiliations

  • Manfred Kohl
    • 1
  1. 1.Institut für MikrostrukturtechnikForschungszentrum KarlsruheKarlsruheGermany

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2004
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-05837-0
  • Online ISBN 978-3-662-09875-2
  • Series Print ISSN 1615-8326
  • Buy this book on publisher's site