CMOS Cantilever Sensor Systems

Atomic Force Microscopy and Gas Sensing Applications

  • D. Lange
  • O. Brand
  • H. Baltes

Part of the Microtechnology and Mems book series (MEMS)

Table of contents

  1. Front Matter
    Pages I-VIII
  2. D. Lange, O. Brand, H. Baltes
    Pages 1-5
  3. D. Lange, O. Brand, H. Baltes
    Pages 7-29
  4. D. Lange, O. Brand, H. Baltes
    Pages 31-56
  5. D. Lange, O. Brand, H. Baltes
    Pages 57-83
  6. D. Lange, O. Brand, H. Baltes
    Pages 85-120
  7. D. Lange, O. Brand, H. Baltes
    Pages 121-124
  8. Back Matter
    Pages 125-143

About this book


This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas.


Atomic force microscopy CMOS compatible micromachining Cantilever Chemical sensors Sensor Sensors microscopy

Authors and affiliations

  • D. Lange
    • 1
  • O. Brand
    • 2
  • H. Baltes
    • 3
  1. 1.Dept. of Electrical Engineering, Center for Integrated SystemsStanford UniversityStanfordUSA
  2. 2.Physical Electronics LaboratoryETH ZürichZürichSwitzerland
  3. 3.Physical Electronics LaboratoryETH ZürichZürichSwitzerland

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2002
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-07728-9
  • Online ISBN 978-3-662-05060-6
  • Series Print ISSN 1615-8326
  • Buy this book on publisher's site