Technology of Integrated Circuits

  • Dietrich Widmann
  • Hermann Mader
  • Hans Friedrich
  • Walter Heywang
  • Rudolf Müller

Part of the Springer Series in ADVANCED MICROELECTRONICS book series (MICROELECTR., volume 2)

Table of contents

  1. Front Matter
    Pages I-XVIII
  2. Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
    Pages 1-2
  3. Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
    Pages 3-11
  4. Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
    Pages 13-93
  5. Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
    Pages 95-167
  6. Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
    Pages 169-206
  7. Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
    Pages 207-234
  8. Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
    Pages 235-248
  9. Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller
    Pages 249-322
  10. Back Matter
    Pages 323-340

About this book

Introduction

Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing.

Keywords

CMOS Elektrotechnik electrical engineering electronics integrated circuit material physics semiconductor

Authors and affiliations

  • Dietrich Widmann
    • 1
  • Hermann Mader
    • 2
  • Hans Friedrich
    • 3
  • Walter Heywang
    • 4
  • Rudolf Müller
    • 4
  1. 1.semiconductor technology developmentInfineon TechnologiesMunichGermany
  2. 2.Department of Electrical Engineering and Information TechnologiesMunich University of Applied SciencesMunichGermany
  3. 3.TELA Versicherungs AGMunichGermany
  4. 4.Technical University MunichMunichGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-662-04160-4
  • Copyright Information Springer-Verlag Berlin Heidelberg 2000
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-08547-5
  • Online ISBN 978-3-662-04160-4
  • Series Print ISSN 1437-0387
  • About this book