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Microsystem Technology and Microrobotics

  • Sergej Fatikow
  • Ulrich Rembold

Table of contents

  1. Front Matter
    Pages I-XII
  2. Sergej Fatikow, Ulrich Rembold
    Pages 1-23
  3. Sergej Fatikow, Ulrich Rembold
    Pages 24-45
  4. Sergej Fatikow, Ulrich Rembold
    Pages 46-65
  5. Sergej Fatikow, Ulrich Rembold
    Pages 66-108
  6. Sergej Fatikow, Ulrich Rembold
    Pages 109-208
  7. Sergej Fatikow, Ulrich Rembold
    Pages 209-262
  8. Sergej Fatikow, Ulrich Rembold
    Pages 263-302
  9. Sergej Fatikow, Ulrich Rembold
    Pages 303-365
  10. Back Matter
    Pages 366-408

About this book

Introduction

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots. Pictures and photos ease unterstanding and a wealth of references allow further work.

Keywords

Sensor actuator control development information microsystems robot robotics

Authors and affiliations

  • Sergej Fatikow
    • 1
  • Ulrich Rembold
    • 1
  1. 1.TU KarlsruheKarlsruheGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-662-03450-7
  • Copyright Information Springer-Verlag Berlin Heidelberg 1997
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-08232-0
  • Online ISBN 978-3-662-03450-7
  • Buy this book on publisher's site