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Silicon Anodization as a Structuring Technique

Literature Review, Modeling and Experiments

  • Alexey Ivanov

Table of contents

  1. Front Matter
    Pages I-XXIX
  2. Alexey Ivanov
    Pages 1-5
  3. Alexey Ivanov
    Pages 7-91
  4. Alexey Ivanov
    Pages 125-143
  5. Alexey Ivanov
    Pages 227-229
  6. Back Matter
    Pages 231-316

About this book

Introduction

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Contents
  • Silicon Anodization: State of the Art
  • Experimental, Characterization and Simulation Methods
  • Microscale Study of Anodization Process
  • Anodization Process as a Structuring Technique: Experiments and Simulation
Target Groups

  • Researchers and students of microsystems technology, electrochemistry, microengineering
  • Practitioners in the area of microsystems, silicon processing and electrochemical material processing
<The Author
Alexey Ivanov
is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.

Keywords

electrochemical etching microsystems FEM simulation microstructuring sacrificial layer electropolishing

Authors and affiliations

  • Alexey Ivanov
    • 1
  1. 1.Fraunhofer ISEFreiburgGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-658-19238-9
  • Copyright Information Springer Fachmedien Wiesbaden GmbH 2018
  • Publisher Name Springer Vieweg, Wiesbaden
  • eBook Packages Engineering
  • Print ISBN 978-3-658-19237-2
  • Online ISBN 978-3-658-19238-9
  • Buy this book on publisher's site