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Low-Pressure Synthetic Diamond

Manufacturing and Applications

  • Bernhard Dischler
  • Christoph Wild

Part of the Springer Series in Materials Processing book series (SSMATERIALSPROC)

Table of contents

  1. Front Matter
    Pages I-XI
  2. Introduction

    1. Front Matter
      Pages 1-1
    2. Bernhard Dischler
      Pages 3-7
  3. Methods of CVD-Diamond Production

    1. Front Matter
      Pages 9-9
    2. Evelio Sevillano
      Pages 11-39
    3. Colin A. Wolden, Zlatko Sitar, Robert F. Davis
      Pages 41-58
    4. Mark A. Cappelli, Thomas G. Owano
      Pages 59-84
    5. Claus-Peter Klages, Lothar Schäfer
      Pages 85-101
    6. Akimitsu Hatta, Akio Hiraki
      Pages 103-118
    7. Norma J. Komplin, Robert H. Hauge
      Pages 119-138
  4. Applications of CVD-Diamond

    1. Front Matter
      Pages 163-163
    2. Christoph Wild
      Pages 189-206
    3. Peter K. Bachmann, Detlef U. Wiechert
      Pages 207-222
    4. Benno Lux, Roland Haubner
      Pages 223-242
    5. Matthias Werner
      Pages 243-260
    6. Shin-ichi Shikata
      Pages 261-280
    7. Peter K. Baumann, Robert J. Nemanich
      Pages 281-303
    8. Richard B. Jackman
      Pages 305-328
    9. Erhard Kohn, Wolfgang Ebert
      Pages 331-359
  5. Outlook

    1. Front Matter
      Pages 361-361
    2. Paul Chalker, Simon Lande
      Pages 363-379
  6. Back Matter
    Pages 381-384

About this book

Introduction

The advent of low-pressure synthesis techniques for the chemical vapour deposition (CVD) of diamond has opened up a new and fascinating field of research and development. The preparation of diamond in the shape of thin films or extended wafers has enabled a variety of new applications, including optical windows, heat spreaders for thermal management, durable cutting tools, and a variety of sensors. Great effort has been made to develop new and efficient methods of economic low-pressure diamond deposition. This book responds to the worldwide interest with a comprehensive presentation of the complete spectrum of methods for CVD-diamond deposition and an overview of the most important applications.

Keywords

CVD diamond X-Ray deposition of thin layers electronic material low pressure methods optical components sensor sensors surface films temperature

Editors and affiliations

  • Bernhard Dischler
    • 1
  • Christoph Wild
    • 1
  1. 1.Fraunhofer-Institut für Angewandte FestkörperphysikFreiburgGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-71992-9
  • Copyright Information Springer-Verlag Berlin Heidelberg 1998
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-71994-3
  • Online ISBN 978-3-642-71992-9
  • Buy this book on publisher's site