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The Physics and Fabrication of Microstructures and Microdevices

Proceedings of the Winter School Les Houches, France, March 25–April 5, 1986

  • Michael J. Kelly
  • Claude Weisbuch
Conference proceedings

Part of the Springer Proceedings in Physics book series (SPPHY, volume 13)

Table of contents

  1. Front Matter
    Pages I-XI
  2. Physics and Engineering of Microfabrication

  3. Physics of Microstructures

  4. Perspectives in Microfabrication Applications

    1. Front Matter
      Pages 351-351
    2. R. H. Dennard
      Pages 352-369
    3. R. Sénéor
      Pages 394-417
    4. E. Rosencher
      Pages 425-434
    5. F. Mitlitsky, J. C. Whitehead, A. F. Bernhardt, B. M. McWilliams
      Pages 443-452
    6. L. D. Jackel, J. S. Denker, H. P. Graf, R. E. Howard, W. Hubbard, D. Schwartz et al.
      Pages 453-460
  5. Poster Session, Abstracts

About these proceedings

Introduction

les Houches This Winter School on "The Physics and Fabrication of Microstructures" originated with a European industrial decision to investigate in some detail the potential of custom-designed microstructures for new devices. Beginning in 1985, GEC and THOMSON started a collaboration on these subjects, supported by an ESPRIT grant from the Commission of the European Com­ munity. To the outside observer of the whole field, it appears clear that the world effort is very largely based in the United States and Japan. It also appears that cooperation and dissemination of results are very well organised outside Europe and act as a major influence on the development of new concepts and devices. In Japan, a main research programme of the Research and Development for Basic Technology for Future Industries is focused on "Future Electron Devices". In Japan and in the United States, many workshops are organised annually in order to bring together the major specialists in industry and academia, allowing fast dissemination of advances and contacts for setting up cooperative efforts.

Keywords

Industrie design development physics

Editors and affiliations

  • Michael J. Kelly
    • 1
  • Claude Weisbuch
    • 2
  1. 1.GEC Research Ltd.Wembley, MiddlesexEngland
  2. 2.Laboratoire Central de RecherchesThomson-CSFOrsayFrance

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-71446-7
  • Copyright Information Springer-Verlag Berlin Heidelberg 1986
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-71448-1
  • Online ISBN 978-3-642-71446-7
  • Series Print ISSN 0930-8989
  • Series Online ISSN 1867-4941
  • Buy this book on publisher's site