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Insulating Films on Semiconductors

Proceedings of the Second International Conference, INFOS 81, Erlangen, Fed. Rep. of Germany, April 27–29, 1981

  • Max J. Schulz
  • Gerhard Pensl
Conference proceedings

Part of the Springer Series in Electrophysics book series (SSEP, volume 7)

Table of contents

  1. Front Matter
    Pages I-X
  2. Si-SiO2 Interface

    1. Front Matter
      Pages 1-1
    2. C. R. Helms
      Pages 19-25
    3. K. Hübner, E. Rogmann, G. Zuther
      Pages 30-34
    4. N. M. Johnson, D. K. Biegelsen, M. D. Moyer
      Pages 35-38
    5. M. W. Hillen, J. Holsbrink, J. F. Verwey
      Pages 43-47
    6. K. Blumenstock, M. Schulz
      Pages 48-53
  3. Thin Insulating Films

    1. Front Matter
      Pages 55-55
    2. G. G. Roberts
      Pages 56-67
    3. M. Commandré, J. Derrien, A. Cros, F. Salvan, G. Sarrabayrouse, J. Buxo
      Pages 68-72
    4. R. B. Beck, A. Jakubowski, J. Ruzyłło
      Pages 73-77
  4. Charge Injection into Insulators

    1. Front Matter
      Pages 87-87
    2. F. J. Feigl, D. R. Young, D. J. DiMaria, S. Lai
      Pages 104-110
    3. D. R. Wolters, J. F. Verwey
      Pages 111-117
    4. J. v. Borzeszkowski, M. Schmidt
      Pages 130-134
  5. Multilayer Structures

    1. Front Matter
      Pages 135-135
    2. H. Teves, N. Klein, P. Balk
      Pages 136-139
    3. P. Tüttő, J. Balázs, Zs. J. Horváth
      Pages 140-144
  6. Interface Characterization Techniques

    1. Front Matter
      Pages 149-149
    2. Edward H. Poindexter, Philip J. Caplan
      Pages 150-160
    3. J. Boucher, M. Lescure, M. Mikhail, J. Simonne
      Pages 165-168
  7. Breakdown and Instability of the SiO2-Si System

    1. Front Matter
      Pages 179-179
    2. D. R. Wolters
      Pages 180-194
    3. Claes Nylander, Marten Armgarth, Christer Svensson
      Pages 195-198
    4. Zheng Youdou, We Fengmei, Jiang Ruolian, Zhou Guangneng
      Pages 199-202
    5. G. Greeuw, H. Hasper
      Pages 203-206
  8. Technology

    1. Front Matter
      Pages 207-207
    2. E. J. Korma, J. Snijder, J. F. Verwey
      Pages 224-227
    3. K. V. Anand, P. Pang, J. B. Butcher, K. Das, E. Franks, G. P. Shorthouse
      Pages 228-231
  9. Laser Processing

    1. Front Matter
      Pages 233-233
    2. N. M. Johnson, D. K. Biegelsen, M. D. Moyer
      Pages 234-237
    3. V. G. I. Deshmukh, A. G. Cullis, H. C. Webber, N. G. Chew, D. V. McCaughan
      Pages 238-241
    4. L. Baufay, M. Failly-Lovato, R. Andrew, M. C. Joliet, L. D. Laude, A. Pigeolet et al.
      Pages 242-245
  10. Transport Properties in Inversion Layers

    1. Front Matter
      Pages 247-247
    2. F. Koch
      Pages 248-258

About these proceedings

Introduction

The INFOS 81 Conference on Insulating Films on Semiconductors was held at the University of Erlangen-NUrnberg in Erlangen from 27 to 29 April 1981. This conference was a sequel to the first conference INFOS 79 held in Durham. INFOS 81 attracted 170 participants from universities, research institutes and industry. Attendants were registered from 15 nations. The biannual topical conference series will be continued by INFOS 83 to be held in Eindhoven, The Netherlands, in April 1983. The conference proceedings include all the invited (Y) and contrlDUtea (42) papers presented at the meeting. The topics range from the basic physical understanding of the properties of insulating films and their interface to semiconductors to the discussion of stability and dielectric strength as well as growing and deposition techniques which are relevant for technical applications. Strong emphasis was given to the semiconductor silicon and its native oxide; however, sessions on compound semiconductors and other insulating films also raised strong interest. The proceedings survey the present state of our understanding of the system of insulating films on semiconductors. As a new aspect of the topic, the properties of semiconductors deposited and laser processed on insulating films was in­ cluded for the first time.

Keywords

Halbleiter Isolierende dünne Schicht laser semiconductor silicon thin films

Editors and affiliations

  • Max J. Schulz
    • 1
  • Gerhard Pensl
    • 1
  1. 1.Institut für Angewandte PhysikUniversität Erlangen-NürnbergErlangenFed. Rep. of Germany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-68247-6
  • Copyright Information Springer-Verlag Berlin Heidelberg 1981
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-68249-0
  • Online ISBN 978-3-642-68247-6
  • Series Print ISSN 0172-5734
  • Buy this book on publisher's site