Novel Optical Technologies for Nanofabrication

  • Qian Liu
  • Xuanming Duan
  • Changsi Peng
Part of the Nanostructure Science and Technology book series (NST)

Table of contents

  1. Front Matter
    Pages i-ix
  2. Qian Liu, Xuanming Duan, Changsi Peng
    Pages 1-4
  3. Qian Liu, Xuanming Duan, Changsi Peng
    Pages 5-41
  4. Qian Liu, Xuanming Duan, Changsi Peng
    Pages 43-80
  5. Qian Liu, Xuanming Duan, Changsi Peng
    Pages 81-151
  6. Qian Liu, Xuanming Duan, Changsi Peng
    Pages 153-178
  7. Qian Liu, Xuanming Duan, Changsi Peng
    Pages 223-267

About this book

Introduction

Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new  techniques and methods as well as applications and development trends  in laser nanofabrication, including super-resolution laser direct writing,  surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on  two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons.

This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques.

Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China.

Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China

Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.

Keywords

Large-format micro/nano-structure Laser direct writing Laser interference Laser path-guided wrinkling Mass production Micro/Nanofabrication Multiphoton process Nanotechnology Super-Resolution Optics Surface plasmon polaritons

Authors and affiliations

  • Qian Liu
    • 1
  • Xuanming Duan
    • 2
  • Changsi Peng
    • 3
  1. 1.National Center for Nanoscience and TechnologyBeijingPeople's Republic of China
  2. 2.Technical Institute of Physics and ChemistryChinese Academy of SciencesBeijingPeople's Republic of China
  3. 3.Institute of Information Optical EngineeringSoochow UniversitySuzhouPeople's Republic of China

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-40387-3
  • Copyright Information Springer-Verlag Berlin Heidelberg 2014
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-642-40386-6
  • Online ISBN 978-3-642-40387-3
  • Series Print ISSN 1571-5744
  • Series Online ISSN 2197-7976
  • About this book