Book 2013

Nanoimprint Lithography: An Enabling Process for Nanofabrication

Authors:

ISBN: 978-3-642-34427-5 (Print) 978-3-642-34428-2 (Online)

Table of contents (10 chapters)

  1. Front Matter

    Pages i-xiii

    Download PDF (176KB)

  2. No Access

    Chapter

    Pages 1-4

    Introduction

    Weimin Zhou

  3. No Access

    Chapter

    Pages 5-32

    Principles and Status of Nanoimprint Lithography

    Weimin Zhou

  4. No Access

    Chapter

    Pages 33-74

    Stamp Fabrication

    Weimin Zhou

  5. No Access

    Chapter

    Pages 75-98

    Stamp Surface Treatment

    Weimin Zhou

  6. No Access

    Chapter

    Pages 99-110

    Nanoimprint Lithography Resists

    Weimin Zhou

  7. No Access

    Chapter

    Pages 111-146

    Nanoimprint Lithography Process

    Weimin Zhou

  8. No Access

    Chapter

    Pages 147-160

    Modeling and Simulation of NIL

    Weimin Zhou

  9. No Access

    Chapter

    Pages 161-202

    Application of NIL in Light-Emitting Diode

    Weimin Zhou

  10. No Access

    Chapter

    Pages 203-216

    Application of NIL in Memory Devices

    Weimin Zhou

  11. No Access

    Chapter

    Pages 217-249

    Application of NIL in Solar Cell

    Weimin Zhou

  12. Back Matter

    Pages 251-256

    Download PDF (89KB)