Nanoimprint Lithography: An Enabling Process for Nanofabrication
About this book
Introduction
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application.
This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology.
Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.
This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology.
Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.
Keywords
Light Emitting Diodes Memory Devices Nanoimprint Lithography Solar Cell
Bibliographic information
- DOI https://doi.org/10.1007/978-3-642-34428-2
- Copyright Information Springer-Verlag Berlin Heidelberg 2013
- Publisher Name Springer, Berlin, Heidelberg
- eBook Packages Engineering
- Print ISBN 978-3-642-34427-5
- Online ISBN 978-3-642-34428-2
- Buy this book on publisher's site