MicroNano Integration

  • Harald Knobloch
  • Yvette Kaminorz

Part of the VDI-Buch book series (VDI-BUCH)

Table of contents

  1. Front Matter
    Pages i-xv
  2. Innovation Aspects of MicroNano Integration

  3. MicroNano Systems and Devices

    1. Front Matter
      Pages 41-41
    2. T. Link, A. Gaißer, M. Braxmaier, I. Simon, A. Schumacher, D. Mintenbeck et al.
      Pages 43-53
    3. T. Pfeifer, Ubaldo Aleriano
      Pages 67-76
    4. H. Klank, D. Snakenborg, R. P. H. Nikolajsen, J. P. Kutter
      Pages 77-78
    5. V. V. Il’chenko, L. G. Il’chenko, A. I. Kravchenko, V. T. Grinchenko
      Pages 81-83
  4. MicroNano Devices for Information Technologies

    1. Front Matter
      Pages 87-87
    2. H. Schenk, U. Dauderstädt, P. Dürr, A. Gehner, A. Wolter, H. Lakner
      Pages 89-96
    3. H.-J. Strobel, W. Bischof, S. Gerlach, H. Schulz, K.-F. Becker, E. Jung et al.
      Pages 97-109
    4. B. Estibals, H. Camon, C. Pisella, F. Verluise
      Pages 111-112
  5. MicroNano Devices for Biomedical Applications

    1. Front Matter
      Pages 113-113
    2. Material Aspects

      1. A. Bietsch, H. P. Lang, C. Gerber, J. Zhang, M. Hegner
        Pages 115-116
      2. M. Grumann, M. Dobmeier, P. Schippers, T. Brenner, R. Zengerle, J. Ducrée et al.
        Pages 117-125
    3. System Aspects

      1. R. Eichinger-Heue, T. Glinsner, P. Kettner, P. Lindner, C. Schaefer, S. Dwyer et al.
        Pages 137-146
      2. J. Ducrée, T. Glatzel, T. Brenner, R. Zengerle
        Pages 147-153
      3. C. Wang, J. Ewins, S. Zhang, W. E. Lindsell, P. G. Meaden, A. F. Fotheringham
        Pages 155-162
  6. Metrology and Standards

  7. Frontiers of MicroNano Fabrication and Engineering

    1. Front Matter
      Pages 211-211
    2. Material Aspects

    3. Fabrication Aspects

      1. P. Karageorgiev, B. Stiller, O. Henneberg, L. Brehmer, A. Nathanson
        Pages 241-243
      2. T. Jäger, D. Werner, A. Stock
        Pages 257-258
      3. R. Lebert, B. Jägle, L. Juschkin, C. Wies, W. Neff, J. Barthel et al.
        Pages 259-261
      4. A. Steck, M. LeNagard, R. Muckenhirn
        Pages 265-266
    4. Reliablity Aspects

      1. J. Kühnholz, G. Lecarpentier
        Pages 277-278
      2. J. Kando, S. Achenbach, R. Fettig, J. Mohr, U. Wallrabe
        Pages 279-286
      3. A. Chau, P. Lambert, A. Delchambre, P. Bouillard
        Pages 287-288

About these proceedings



In recent years, micro- and nanotechnologies became key technologies, having a significant effect on the development of new products and production technologies, as well as on novel medical diagnosis and treatment methods. Moreover, due to their enormous potential for new applications, micro- and nanotechnologies, in future, will increasingly affect our every days life, with an impact, comparable to that of the industrial revolution in the 19th century, or the developments in microelectronics in the 20th century.

Although, micro- and nanotechnologies, in general, are regarded as two independent disciplines, there is obviously an intense interaction between these two fascinating technologies. The term "MicroNano Integration", in this context, addresses the enormous potential of synergy effects, provided by the combination and mutual integration of micro- and nanotechnological elements.

In order to discuss the integration aspects of micro- and nanotechnologies, the "International Forum on MicroNano Integration", a conference, held in Potsdam, Germany on December 3 - 4, 2003 brought together researchers from both communities - from industries as well as from scientific institutions. The contributions to this book reflect the discussions during the conference.  





Multiplexer Sensor Standard communication development diagnosis dielectrics electronics laser material microcontroller microelectromechanical system (MEMS) microelectronics microsystems production

Editors and affiliations

  • Harald Knobloch
    • 1
  • Yvette Kaminorz
    • 1
  1. 1.VDI/VDE-TechnologiezentrumInformationstechnik GmbHTeltowGermany

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2004
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-62265-6
  • Online ISBN 978-3-642-18727-8
  • Buy this book on publisher's site