Semiconductor-On-Insulator Materials for Nanoelectronics Applications

  • Alexei Nazarov
  • J.-P. Colinge
  • Francis Balestra
  • Jean-Pierre Raskin
  • Francisco Gamiz
  • V.S. Lysenko

Part of the Engineering Materials book series (ENG.MAT.)

Table of contents

  1. Front Matter
    Pages i-ix
  2. New Semiconductor-On-Insulator Materials

    1. Front Matter
      Pages 1-1
    2. H. Gamble, B. M. Armstrong, P. T. Baine, Y. H. Low, P. V. Rainey, S. J. N. Mitchell et al.
      Pages 3-29
    3. N. P. Blanchard, A. Boucherif, Ph. Regreny, A. Danescu, H. Magoariec, J. Penuelas et al.
      Pages 47-65
    4. A. Lecestre, E. Dubois, A. Villaret, T. Skotnicki, P. Coronel, G. Patriarche et al.
      Pages 67-89
  3. Physics of Modern SemOI Devices

    1. Front Matter
      Pages 121-121
    2. N. Horiguchi, B. Parvais, T. Chiarella, N. Collaert, A. Veloso, R. Rooyackers et al.
      Pages 141-153
    3. T. Poiroux, F. Andrieu, O. Weber, C. Fenouillet-Béranger, C. Buj-Dufournet, P. Perreau et al.
      Pages 155-168
    4. F. Gámiz, L. Donetti, C. Sampedro, A. Godoy, N. Rodríguez, F. Jiménez-Molinos
      Pages 169-185
    5. J. P. Colinge, C. W. Lee, N. Dehdashti Akhavan, R. Yan, I. Ferain, P. Razavi et al.
      Pages 187-200
    6. Huu-Nha Nguyen, Damien Querlioz, Arnaud Bournel, Sylvie Retailleau, Philippe Dollfus
      Pages 215-235
    7. M. Sanquer, X. Jehl, M. Pierre, B. Roche, M. Vinet, R. Wacquez
      Pages 251-263
  4. Diagnostics of the SOI Devices

    1. Front Matter
      Pages 265-265
    2. J. A. Martino, P. G. D. Agopian, E. Simoen, C. Claeys
      Pages 267-286
    3. N. Lukyanchikova, N. Garbar, V. Kudina, A. Smolanka, E. Simoen, C. Claeys
      Pages 287-306

About this book

Introduction

"Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.

Keywords

MEMS MOSFET nanowires sensors

Editors and affiliations

  • Alexei Nazarov
    • 1
  • J.-P. Colinge
    • 2
  • Francis Balestra
    • 3
  • Jean-Pierre Raskin
    • 4
  • Francisco Gamiz
    • 5
  • V.S. Lysenko
    • 6
  1. 1., Lashkaryov Inst. of Semiconductor PhysicNational Academy of Sciences of UkraineKyivUkraine
  2. 2.Tyndall National Institute, """Lee Maltings"""University CollegeCorkIreland
  3. 3.IMEP-LAHCSinano InstituteGrenoble Cedex 1France
  4. 4.Microwave LaboratoryUniversité Catholique de LouvainLouvain-la-NeuveBelgium
  5. 5.Nanoelectronics Research Group, Departmento de ElectrónicaUniversidad de GranadaGranadaSpain
  6. 6., Lashkaryov Inst. of Semiconductor PhysicNational Academy of Science of UkraineKyivUkraine

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-642-15868-1
  • Copyright Information Springer-Verlag Berlin Heidelberg 2011
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-642-15867-4
  • Online ISBN 978-3-642-15868-1
  • Series Print ISSN 1612-1317
  • Series Online ISSN 1868-1212
  • About this book