Handbook of Thin-Film Technology

  • Hartmut Frey
  • Hamid R. Khan

Table of contents

  1. Front Matter
    Pages i-xiii
  2. Hartmut Frey
    Pages 13-71
  3. Hartmut Frey
    Pages 73-115
  4. Hartmut Frey
    Pages 117-132
  5. Hartmut Frey
    Pages 133-165
  6. Hartmut Frey
    Pages 167-179
  7. Hartmut Frey
    Pages 181-224
  8. Hartmut Frey
    Pages 225-252
  9. Hartmut Frey
    Pages 279-299
  10. Hartmut Frey, Thomas Helmut
    Pages 301-355
  11. Hamid R. Khan
    Pages 357-374
  12. Hartmut Frey, Thomas Hellmuth
    Pages E1-E1
  13. Back Matter
    Pages 375-379

About this book


“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.


Coating characterization Coatings Film characterization Film deposition techniques Thin layers

Editors and affiliations

  • Hartmut Frey
    • 1
  • Hamid R. Khan
    • 2
  1. 1.EsslingenGermany
  2. 2.Schwäbisch GmündGermany

Bibliographic information