Applied Scanning Probe Methods XII


  • Bharat Bhushan
  • Harald Fuchs

Part of the NanoScience and Technology book series (NANO)

Table of contents

  1. Front Matter
    Pages I-LV
  2. David Alsteens, Vincent Dupres, Etienne Dague, Claire Verbelen, Guillaume André, Grégory Francius et al.
    Pages 33-48
  3. Gabriella Bolzon, Massimiliano Bocciarelli, Enzo J. Chiarullo
    Pages 85-120
  4. G. Rubio-Bollinger, J.J. Riquelme, S. Vieira, N. Agraït
    Pages 121-147
  5. Abdelhamid Maali, Touria Cohen-Bouhacina, Cedric Hurth, Cédric Jai, R. Boisgard, Jean-Pierre Aimé
    Pages 149-164
  6. Back Matter
    Pages 221-224

About this book


Crack initiation and growth are key issues when it comes to the mechanical reliab- ity of microelectronic devices and microelectromechanical systems (MEMS). Es- cially in organic electronics where exible substrates will play a major role these issues will become of utmost importance. It is therefore necessary to develop me- ods which in situ allow the experimental investigation of surface deformation and fracture processes in thin layers at a micro and nanometer scale. While scanning electron microscopy (SEM) might be used it is also associated with some major experimental drawbacks. First of all if polymers are investigated they usually have to be coated with a metal layer due to their commonly non-conductive nature. Additi- ally they might be damaged by the electron beam of the microscope or the vacuum might cause outgasing of solvents or evaporation of water and thus change material properties. Furthermore, for all kinds of materials a considerable amount of expe- mental effort is necessary to build a tensile testing machine that ts into the chamber. Therefore, a very promising alternative to SEM is based on the use of an atomic force microscope (AFM) to observe in situ surface deformation processes during straining of a specimen. First steps towards this goal were shown in the 1990s in [1–4] but none of these approaches truly was a microtensile test with sample thicknesses in the range of micrometers. To the authors’ knowledge, this was shown for the rst time by Hild et al. in [5]. 16.


AFM REM UPS ceramics liquid microscopy polymer

Editors and affiliations

  • Bharat Bhushan
    • 1
  • Harald Fuchs
    • 2
  1. 1.Nanoprobe Laboratory for Bio- & Nanotechnology & Biomimetics (NLB2)Ohio State UniversityColumbusUSA
  2. 2.Universität Münster FB 16 Physikalisches InstitutGermany

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2009
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Chemistry and Materials Science
  • Print ISBN 978-3-540-85038-0
  • Online ISBN 978-3-540-85039-7
  • Series Print ISSN 1434-4904
  • Buy this book on publisher's site