Applied Charged Particle Optics

  • HelmutĀ Liebl

Table of contents

  1. Front Matter
    Pages I-X
  2. Pages 67-88
  3. Pages 89-103
  4. Pages 105-107
  5. Back Matter
    Pages 109-131

About this book


Authored by a pioneer of the field, this overview of charged particle optics provides a solid introduction to the field for all physicists wishing to design their own apparatus or better understand the instruments with which they work. Applied Charged Particle Optics begins by introducing electrostatic lenses and fields used for acceleration, focussing and deflection of ions or electrons. Subsequent chapters give detailed descriptions of electrostatic deflection elements, uniform and non-uniform magnetic sector fields, image aberrations, and, finally, fringe field confinement. A chapter on applications is added.


Electron beams Electron spectrometry Ion-beam optics Mass spectroscopy design optics spectroscopy surface analysis

Authors and affiliations

  • HelmutĀ Liebl
    • 1
  1. 1.Surface Physics DivisionMax Planck Institute for Plasma PhysicsGarching/Munich

Bibliographic information