Scanning Electron Microscopy

Physics of Image Formation and Microanalysis

  • Ludwig Reimer

Part of the Springer Series in Optical Sciences book series (SSOS, volume 45)

Table of contents

  1. Front Matter
    Pages I-XIV
  2. Ludwig Reimer
    Pages 1-12
  3. Ludwig Reimer
    Pages 57-134
  4. Ludwig Reimer
    Pages 171-205
  5. Ludwig Reimer
    Pages 207-251
  6. Ludwig Reimer
    Pages 289-328
  7. Ludwig Reimer
    Pages 329-377
  8. Ludwig Reimer
    Pages 379-447
  9. Back Matter
    Pages 449-529

About this book

Introduction

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Keywords

Rasterelektronen Mikroskopie Scanning Tunneling Microscopy crystal diffraction electron microscope electron microscopy electron optics microscopy optics scanning electron microscope

Authors and affiliations

  • Ludwig Reimer
    • 1
  1. 1.Physikalisches InstitutWestfälische Wilhelms-Universität MünsterMünsterGermany

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-540-38967-5
  • Copyright Information Springer-Verlag Berlin Heidelberg 1998
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Springer Book Archive
  • Print ISBN 978-3-642-08372-3
  • Online ISBN 978-3-540-38967-5
  • Series Print ISSN 0342-4111
  • Series Online ISSN 1556-1534
  • About this book