Optical Characterization of Thin Solid Films

  • Olaf Stenzel
  • Miloslav Ohlídal

Part of the Springer Series in Surface Sciences book series (SSSUR, volume 64)

Table of contents

  1. Front Matter
    Pages i-xxiv
  2. Introduction and Modelling

    1. Front Matter
      Pages 1-1
    2. O. Stenzel, Miloslav Ohlídal
      Pages 3-10
    3. Daniel Franta, Jiří Vohánka, Martin Čermák
      Pages 31-82
    4. Pavel Ondračka, David Holec, Lenka Zajíčková
      Pages 83-104
  3. Spectrophotometry and Spectral Ellipsometry

    1. Front Matter
      Pages 105-105
    2. Miloslav Ohlídal, Jiří Vodák, David Nečas
      Pages 107-141
    3. Ivan Ohlídal, Jiří Vohánka, Martin Čermák, Daniel Franta
      Pages 233-267
  4. Characterization of Defective and Corrugated Coatings

    1. Front Matter
      Pages 269-269
    2. Ivan Ohlídal, Martin Čermák, Jiří Vohánka
      Pages 271-313
    3. Stefanie Kroker, Thomas Siefke
      Pages 341-358
    4. Thomas Siefke, Stefanie Kroker
      Pages 359-374
  5. Scatter and Absorption

    1. Front Matter
      Pages 375-375
    2. M. Trost, S. Schröder
      Pages 377-405
  6. Back Matter
    Pages 457-462

About this book


This book is an up-to-date survey of the major optical characterization techniques for thin solid films. Emphasis is placed on practicability of the various approaches. Relevant fundamentals are briefly reviewed before demonstrating the application of these techniques to practically relevant research and development topics. The book is written by international top experts, all of whom are involved in industrial research and development projects.


Optical Coating Characterization Optical Properties of Thin Solid Films Optical Constants Interface Spectroscopy Solid State Spectroscopy Spectroscopic Imaging Spectrophotometry

Editors and affiliations

  • Olaf Stenzel
    • 1
  • Miloslav Ohlídal
    • 2
  1. 1.Abbe School of PhotonicsFriedrich-Schiller-University JenaJenaGermany
  2. 2.Institute of Physical EngineeringBrno University of TechnologyBrnoCzech Republic

Bibliographic information