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Nanofabrication

Principles, Capabilities and Limits

  • Zheng Cui

Table of contents

  1. Front Matter
    Pages i-xvii
  2. Zheng Cui
    Pages 1-7
  3. Zheng Cui
    Pages 9-90
  4. Zheng Cui
    Pages 91-148
  5. Zheng Cui
    Pages 149-175
  6. Zheng Cui
    Pages 177-207
  7. Zheng Cui
    Pages 209-266
  8. Zheng Cui
    Pages 267-304
  9. Zheng Cui
    Pages 335-364
  10. Zheng Cui
    Pages 365-399
  11. Back Matter
    Pages 427-432

About this book

Introduction

This second edition of Nanofabrication is one of the most comprehensive introductions on nanofabrication technologies and processes. A practical guide and reference, this book introduces readers to all of the developed technologies that are capable of making structures below 100nm. The principle of each technology is introduced and illustrated with minimum mathematics involved. Also analyzed are the capabilities of each technology in making sub-100nm structures, and the limits of preventing a technology from going further down the dimensional scale. This book provides readers with a toolkit that will help with any of their nanofabrication challenges.

Keywords

Additive nanomanufacturing Electron beam lithography Nanofabrication Nanoimprinting Nanoscale pattern transfer Nanostructure by self-assembly Scanning probe nanofabrication

Authors and affiliations

  • Zheng Cui
    • 1
  1. 1.Suzhou Institute of Nano-Tech and Nano-Nanobionics (SINANO)SuzhouChina

Bibliographic information

  • DOI https://doi.org/10.1007/978-3-319-39361-2
  • Copyright Information Springer International Publishing Switzerland 2017
  • Publisher Name Springer, Cham
  • eBook Packages Engineering
  • Print ISBN 978-3-319-39359-9
  • Online ISBN 978-3-319-39361-2
  • Buy this book on publisher's site