Advertisement

Rapid Thermal Processing of Semiconductors

  • Victor E. Borisenko
  • Peter J. Hesketh

Part of the Microdevices book series (MDPF)

Table of contents

  1. Front Matter
    Pages i-xxii
  2. Victor E. Borisenko, Peter J. Hesketh
    Pages 1-29
  3. Victor E. Borisenko, Peter J. Hesketh
    Pages 93-111
  4. Victor E. Borisenko, Peter J. Hesketh
    Pages 149-191
  5. Victor E. Borisenko, Peter J. Hesketh
    Pages 193-252
  6. Victor E. Borisenko, Peter J. Hesketh
    Pages 253-300
  7. Back Matter
    Pages 301-358

About this book

Introduction

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Keywords

crystal diffusion segregation semiconductor thin films

Authors and affiliations

  • Victor E. Borisenko
    • 1
  • Peter J. Hesketh
    • 2
  1. 1.Belarussian State University of Informatics and RadioelectronicsMinskRepublic of Belarus
  2. 2.The University of Illinois at ChicagoChicagoUSA

Bibliographic information