Microanalysis of Solids

  • B. G. Yacobi
  • D. B. Holt
  • L. L. Kazmerski

Table of contents

  1. Front Matter
    Pages i-xiii
  2. Introduction

    1. Front Matter
      Pages 1-1
    2. B. G. Yacobi, D. B. Holt
      Pages 3-22
  3. Electron Beam Techniques

    1. Front Matter
      Pages 23-23
    2. B. G. Yacobi, D. B. Holt
      Pages 25-63
    3. A. J. Garratt-Reed
      Pages 65-98
    4. L. L. Kazmerski
      Pages 99-146
  4. Ion Beam Techniques

    1. Front Matter
      Pages 147-147
    2. S. E. Asher
      Pages 149-177
  5. Photon Beam Techniques

    1. Front Matter
      Pages 217-217
    2. T. Wilson
      Pages 219-232
    3. A. G. Michette, A. W. Potts
      Pages 233-246
    4. A. J. Nelson
      Pages 247-267
    5. R. W. Odom, F. Radicati di Brozolo
      Pages 269-284
    6. R. F. Cohn
      Pages 285-324
  6. Acoustic Wave Excitation

    1. Front Matter
      Pages 325-325
    2. P. Mutti, G. A. D. Briggs
      Pages 327-355
  7. Tunneling of Electrons and Scanning Probe Microscopies

    1. Front Matter
      Pages 357-357
    2. D. A. Grigg, P. E. Russell
      Pages 389-447
  8. Back Matter
    Pages 449-460

About this book


The main objective of this book is to systematically describe the basic principles of the most widely used techniques for the analysis of physical, structural, and compositional properties of solids with a spatial resolution of approxi­ mately 1 ~m or less. Many books and reviews on a wide variety of microanalysis techniques have appeared in recent years, and the purpose of this book is not to replace them. Rather, the motivation for combining the descriptions of various mi­ croanalysis techniques in one comprehensive volume is the need for a reference source to help identify microanalysis techniques, and their capabilities, for obtaining particular information on solid-state materials. In principle, there are several possible ways to group the various micro­ analysis techniques. They can be distinguished by the means of excitation, or the emitted species, or whether they are surface or bulk-sensitive techniques, or on the basis of the information obtained. We have chosen to group them according to the means of excitation. Thus, the major parts of the book are: Electron Beam Techniques, Ion Beam Techniques, Photon Beam Techniques, Acoustic Wave Excitation, and Tunneling of Electrons and Scanning Probe Microscopies. We hope that this book will be useful to students (final year undergrad­ uates and graduates) and researchers, such as physicists, material scientists, electrical engineers, and chemists, working in a wide variety of fields in solid­ state sciences.


Photoemission spectroscopy electron microscopy ellipsometry microscopy spectroscopy transmission electron microscopy

Editors and affiliations

  • B. G. Yacobi
    • 1
  • D. B. Holt
    • 2
  • L. L. Kazmerski
    • 3
  1. 1.EMTECHTorontoCanada
  2. 2.Department of MaterialsImperial CollegeLondonEngland
  3. 3.National Renewable Energy LaboratoryGoldenUSA

Bibliographic information