Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators

  • Gerhard Lammel
  • Sandra Schweizer
  • Philippe Renaud

Part of the Microsystems book series (MICT, volume 14)

Table of contents

  1. Front Matter
    Pages i-xi
  2. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 1-26
  3. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 27-66
  4. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 67-76
  5. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 77-112
  6. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 113-134
  7. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 135-164
  8. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 165-194
  9. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 195-210
  10. Gerhard Lammel, Sandra Schweizer, Philippe Renaud
    Pages 211-215
  11. Back Matter
    Pages 217-268

About this book

Introduction

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly.

An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component.

The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.

Keywords

architecture calibration design filter laser laser diode microsystems optics packaging simulation spectroscopy stress

Authors and affiliations

  • Gerhard Lammel
    • 1
  • Sandra Schweizer
    • 1
  • Philippe Renaud
    • 1
  1. 1.Swiss Federal Institute of Technology LausanneEPFLSwitzerland

Bibliographic information

  • DOI https://doi.org/10.1007/978-1-4757-6083-5
  • Copyright Information Springer-Verlag US 2002
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4419-4946-2
  • Online ISBN 978-1-4757-6083-5
  • Series Print ISSN 1389-2134
  • About this book