Methodology for the Modeling and Simulation of Microsystems

  • Authors
  • Bartlomiej¬†F.¬†Romanowicz

Part of the Microsystems book series (MICT, volume 2)

Table of contents

  1. Front Matter
    Pages i-xxviii
  2. Bartlomiej F. Romanowicz
    Pages 1-9
  3. Bartlomiej F. Romanowicz
    Pages 11-22
  4. Bartlomiej F. Romanowicz
    Pages 23-35
  5. Bartlomiej F. Romanowicz
    Pages 37-59
  6. Bartlomiej F. Romanowicz
    Pages 61-87
  7. Bartlomiej F. Romanowicz
    Pages 89-114
  8. Bartlomiej F. Romanowicz
    Pages 115-122
  9. Back Matter
    Pages 123-136

About this book


Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas.
The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modeling and simulation of microsystems.
Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems.


Sensor Standard VHDL analog integrated circuit microsystems modeling production simulation tables

Bibliographic information

  • DOI
  • Copyright Information Kluwer Academic Publishers 1998
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4613-7572-2
  • Online ISBN 978-1-4615-5621-3
  • Series Print ISSN 1389-2134
  • Buy this book on publisher's site